Granted Patent
Utility
US 6,340,327 · App. 09/419,259
Wafer polishing apparatus and process
Inventor:
Samir A. Afif
Patented Case
View Patent ↗
Granted: Jan 22, 2002
Filed: Oct 15, 1999
Inventor
Samir A. Afif
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.