Granted Patent
Utility
US 6,340,557 · App. 09/160,329
Pattern formation method
Inventor:
Koji Shimomura
Patented Case
View Patent ↗
Granted: Jan 22, 2002
Filed: Sep 25, 1998
Inventor
Koji Shimomura
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.