Granted Patent
Utility
US 6,340,637 · App. 09/730,038
Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants
Inventors:
Ravi Iyer, Sujit Sharan
Patented Case
View Patent ↗
Granted: Jan 22, 2002
Filed: Dec 5, 2000
Inventors
Ravi Iyer
Sujit Sharan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.