Granted Patent
Utility
US 6,342,134 · App. 09/503,225
Method for producing piezoelectric films with rotating magnetron sputtering system
Inventors:
Bradley Paul Barber, Ronald E. Miller
Patented Case
View Patent ↗
Granted: Jan 29, 2002
Filed: Feb 11, 2000
Inventors
Bradley Paul Barber
Ronald E. Miller
Assignee (at issue)
Agere Systems Guardian Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.