Granted Patent
Utility
US 6,343,178 · App. 09/707,602
Micromachined voltage controlled optical attenuator
Inventors:
Brent E. Burns, Tseng-Yang Hsu
Patented Case
View Patent ↗
Granted: Jan 29, 2002
Filed: Nov 7, 2000
Inventors
Brent E. Burns
Tseng-Yang Hsu
Assignee (at issue)
Integrated Micromachines, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.