IP Library Granted Patent US 6,344,117
Granted Patent Utility
US 6,344,117 · App. 09/383,506

Backing plate for sputtering

Inventors: Masatoshi Enomoto, Seiji Tasaki, Naoyuki Kawata, Takenori Hashimoto
Patented Case View Patent ↗
Granted: Feb 5, 2002 Filed: Aug 26, 1999
Inventors
Masatoshi Enomoto
Seiji Tasaki
Naoyuki Kawata
Takenori Hashimoto
Assignee (at issue)
Showa Denko K.K.

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Quick Facts
Patent No.
US 6,344,117
App. No.
09/383,506
Filed
1999-08-26
Granted
2002-02-05
Kind
B2