Granted Patent
Utility
US 6,344,150 · App. 09/403,084
Etching method
Inventors:
Robert Eason, Graeme W Ross, Peter George Robin Smith, Ian E Barry
Patented Case
View Patent ↗
Granted: Feb 5, 2002
Filed: Nov 23, 1999
Inventors
Robert Eason
Graeme W Ross
Peter George Robin Smith
Ian E Barry
Assignee (at issue)
QINETIQ LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.