Granted Patent
Utility
US 6,346,480 · App. 09/885,343
Method for forming aluminum interconnection
Inventors:
Yoshiaki Yamamoto, Toshiyuki Hirota
Patented Case
View Patent ↗
Granted: Feb 12, 2002
Filed: Jun 18, 2001
Inventors
Yoshiaki Yamamoto
Toshiyuki Hirota
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.