Granted Patent
Utility
US 6,346,741 · App. 09/200,499
Compositions and structures for chemical mechanical polishing of FeRAM capacitors and method of fabricating FeRAM capacitors using same
Inventors:
Peter C. Van Buskirk, Michael W. Russell, Steven M. Bilodeau, Thomas H. Baum
Patented Case
View Patent ↗
Granted: Feb 12, 2002
Filed: Nov 25, 1998
Inventors
Peter C. Van Buskirk
Michael W. Russell
Steven M. Bilodeau
Thomas H. Baum
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.