IP Library Granted Patent US 6,346,965
Granted Patent Utility
US 6,346,965 · App. 08/994,609

High resolution imaging system for simultaneous acquisition of two high aspect ratio object fields

Inventor: Peng Seng Toh
Patented Case View Patent ↗
Granted: Feb 12, 2002 Filed: Dec 19, 1997
Inventor
Peng Seng Toh
Assignee (at issue)
Agilent Technologies, Inc.

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Quick Facts
Patent No.
US 6,346,965
App. No.
08/994,609
Filed
1997-12-19
Granted
2002-02-12
Kind
B1