Granted Patent
Utility
US 6,347,176 · App. 09/595,169
Acousto-optical light tunnel apparatus and method
Inventors:
Andrew M. Hawryluk, David G. Stites, Boris Grek
Patented Case
View Patent ↗
Granted: Feb 12, 2002
Filed: Jun 15, 2000
Inventors
Andrew M. Hawryluk
David G. Stites
Boris Grek
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.