Granted Patent
Utility
US 6,347,982 · App. 09/303,483
Method for making a polishing apparatus utilizing brazed diamond technology and titanium nitride
Inventor:
Paul Holzapfel
Patented Case
View Patent ↗
Granted: Feb 19, 2002
Filed: Apr 30, 1999
Inventor
Paul Holzapfel
Assignee (at issue)
SpeedFam-IPEC Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.