Granted Patent
Utility
US 6,348,098 · App. 09/488,146
Flow controller
Inventors:
Robert F. McLoughlin, George Gonnella, Timothy J. King
Patented Case
View Patent ↗
Granted: Feb 19, 2002
Filed: Jan 20, 2000
Inventors
Robert F. McLoughlin
George Gonnella
Timothy J. King
Assignee (at issue)
Mykrolis Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.