Granted Patent
Utility
US 6,348,159 · App. 09/250,654
Method and apparatus for etching coated substrates
Inventors:
Todd James Dapkus, John Bohland
Patented Case
View Patent ↗
Granted: Feb 19, 2002
Filed: Feb 15, 1999
Inventors
Todd James Dapkus
John Bohland
Assignee (at issue)
First Solar, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.