Granted Patent
Utility
US 6,348,395 · App. 09/589,818
Diamond as a polish-stop layer for chemical-mechanical planarization in a damascene process flow
Inventors:
Lawrence A. Clevenger, Louis L. Hsu, Jeremy K. Stephens, Michael Wise
Patented Case
View Patent ↗
Granted: Feb 19, 2002
Filed: Jun 7, 2000
Inventors
Lawrence A. Clevenger
Louis L. Hsu
Jeremy K. Stephens
Michael Wise
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.