Granted Patent
Utility
US 6,350,393 · App. 09/428,965
Use of CsOH in a dielectric CMP slurry
Inventors:
Alicia F. Francis, Brian L. Mueller, James A. Dirksen, Paul M. Feeney
Patented Case
View Patent ↗
Granted: Feb 26, 2002
Filed: Nov 4, 1999
Inventors
Alicia F. Francis
Brian L. Mueller
James A. Dirksen
Paul M. Feeney
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.