Granted Patent
Utility
US 6,350,683 · App. 09/644,044
Method of forming a tungsten plug in a hole
Inventor:
Mieko Hasegawa
Patented Case
View Patent ↗
Granted: Feb 26, 2002
Filed: Aug 23, 2000
Inventor
Mieko Hasegawa
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.