Granted Patent
Utility
US 6,352,893 · App. 09/324,927
Low temperature self-aligned collar formation
Inventors:
Alexander Michaelis, Stephan Kudelka, Jochen Beintner, Oliver Genz
Patented Case
View Patent ↗
Granted: Mar 5, 2002
Filed: Jun 3, 1999
Inventors
Alexander Michaelis
Stephan Kudelka
Jochen Beintner
Oliver Genz
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.