IP Library Granted Patent US 6,355,147
Granted Patent Utility
US 6,355,147 · App. 09/459,008

Porous electrode apparatus for electrodeposition of detailed metal structures or microelectronic interconnections

Inventors: Stewart Griffiths, Robert H. Nilson, Jill M. Hruby
Patented Case View Patent ↗
Granted: Mar 12, 2002 Filed: Dec 10, 1999
Inventors
Stewart Griffiths
Robert H. Nilson
Jill M. Hruby
Assignee (at issue)
Sandia Corporation

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Quick Facts
Patent No.
US 6,355,147
App. No.
09/459,008
Filed
1999-12-10
Granted
2002-03-12
Kind
B1