Granted Patent
Utility
US 6,355,495 · App. 09/553,339
Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof
Inventors:
Naohiko Fujino, Isamu Karino, Masahi Ohmori, Masatoshi Yasutake, Shigeru Wakiyama
Patented Case
View Patent ↗
Granted: Mar 12, 2002
Filed: Apr 20, 2000
Inventors
Naohiko Fujino
Isamu Karino
Masahi Ohmori
Masatoshi Yasutake
Shigeru Wakiyama
Assignees (at issue)
MITSUBISHI ELECTRIC CORPORATION
SEIKO INSTRUMENTS INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.