Granted Patent
Utility
US 6,355,498 · App. 09/637,069
Thin film resonators fabricated on membranes created by front side releasing
Inventors:
Edward Ming CHAN, Harold Alexis Huggins, Jungsang Kim, Hyongsok Soh
Patented Case
View Patent ↗
Granted: Mar 12, 2002
Filed: Aug 11, 2000
Inventors
Edward Ming CHAN
Harold Alexis Huggins
Jungsang Kim
Hyongsok Soh
Assignee (at issue)
Agere Systems Guartian Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.