IP Library › Granted Patent US 6,356,091
Granted Patent Utility
US 6,356,091 · App. 09/196,261

Automatic wafer mapping in a wet environment on a wafer cleaner

Inventors: Jack F. Nimtz, Toby Jordan, Robert F. Allen
Patented Case View Patent ↗
Granted: Mar 12, 2002 Filed: Nov 19, 1998
Inventors
Jack F. Nimtz
Toby Jordan
Robert F. Allen
Assignee (at issue)
SpeedFam-IPEC Corporation

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Quick Facts
Patent No.
US 6,356,091
App. No.
09/196,261
Filed
1998-11-19
Granted
2002-03-12
Kind
B1