Granted Patent
Utility
US 6,356,576 · App. 09/450,919
Deep ultraviolet catadioptric anamorphic telescope
Inventor:
Scott T. Smith
Patented Case
View Patent ↗
Granted: Mar 12, 2002
Filed: Nov 29, 1999
Inventor
Scott T. Smith
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.