Granted Patent
Utility
US 6,357,299 · App. 09/372,306
Micromechanical sensor and method for producing the same
Inventors:
Robert Aigner, Thomas Bever, Hans-Jörg Timme
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Aug 11, 1999
Inventors
Robert Aigner
Thomas Bever
Hans-Jörg Timme
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.