Granted Patent
Utility
US 6,357,432 · App. 09/771,839
Silicon support members for wafer processing fixtures
Inventors:
Raanan Zehavi, Robert L. Davis
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Jan 29, 2001
Inventors
Raanan Zehavi
Robert L. Davis
Assignee (at issue)
Integrated Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.