Granted Patent
Utility
US 6,358,801 · App. 09/644,282
Method and apparatus for trench isolation process with pad gate and trench edge spacer elimination
Inventors:
Pierre C. Fazan, Gurtej S. Sandhu
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Aug 22, 2000
Inventors
Pierre C. Fazan
Gurtej S. Sandhu
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.