IP Library Granted Patent US 6,359,388
Granted Patent Utility
US 6,359,388 · App. 09/649,010

Cold cathode ion beam deposition apparatus with segregated gas flow

Inventor: Rudolph Hugo Petrmichl
Patented Case View Patent ↗
Granted: Mar 19, 2002 Filed: Aug 28, 2000
Inventor
Rudolph Hugo Petrmichl
Assignee (at issue)
Guardian Industries Corp.

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Quick Facts
Patent No.
US 6,359,388
App. No.
09/649,010
Filed
2000-08-28
Granted
2002-03-19
Kind
B1