Granted Patent
Utility
US 6,359,693 · App. 09/737,181
Double pass double etalon spectrometer
Inventors:
Scott T. Smith, Alexander I. Ershov, Jesse Buck
Patented Case
View Patent ↗
Granted: Mar 19, 2002
Filed: Dec 14, 2000
Inventors
Scott T. Smith
Alexander I. Ershov
Jesse Buck
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.