Granted Patent
Utility
US 6,360,686 · App. 09/382,050
Plasma reactor with a deposition shield
Inventors:
Stephen P. DeOrnellas, Robert Ditizio
Patented Case
View Patent ↗
Granted: Mar 26, 2002
Filed: Aug 24, 1999
Inventors
Stephen P. DeOrnellas
Robert Ditizio
Assignee (at issue)
TEGAL CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.