Granted Patent
Utility
US 6,362,033 · App. 09/460,318
Self-aligned LDD formation with one-step implantation for transistor formation
Inventors:
Heon Lee, Young Jin Park
Patented Case
View Patent ↗
Granted: Mar 26, 2002
Filed: Dec 14, 1999
Inventors
Heon Lee
Young Jin Park
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.