Granted Patent
Utility
US 6,362,040 · App. 09/501,502
Reduction of orientation dependent oxidation for vertical sidewalls of semiconductor substrates
Inventors:
Helmut Tews, Brian Lee, Ulrike Gruening, Raj Jammy, John Faltermeier
Patented Case
View Patent ↗
Granted: Mar 26, 2002
Filed: Feb 9, 2000
Inventors
Helmut Tews
Brian Lee
Ulrike Gruening
Raj Jammy
John Faltermeier
Assignees (at issue)
Infineon Technologies AG
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.