Granted Patent
Utility
US 6,364,595 · App. 09/247,695
Reticle transfer system
Inventors:
Anthony C. Bonora, William J. Fosnight, Joshua W. Shenk
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Feb 10, 1999
Inventors
Anthony C. Bonora
William J. Fosnight
Joshua W. Shenk
Assignee (at issue)
Asyst Technologies L.L.C.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.