IP Library Granted Patent US 6,364,604
Granted Patent Utility
US 6,364,604 · App. 09/347,355

Vacuum pump and vacuum apparatus equipped with vacuum pump

Inventors: Manabu Nonaka, Takashi Okada
Patented Case View Patent ↗
Granted: Apr 2, 2002 Filed: Jul 6, 1999
Inventors
Manabu Nonaka
Takashi Okada
Assignee (at issue)
SEIKO INSTRUMENTS INC.

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Quick Facts
Patent No.
US 6,364,604
App. No.
09/347,355
Filed
1999-07-06
Granted
2002-04-02
Kind
B1