Granted Patent
Utility
US 6,364,956 · App. 09/237,502
Programmable flux gradient apparatus for co-deposition of materials onto a substrate
Inventors:
Youqi Wang, Xin Wu
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Jan 26, 1999
Inventors
Youqi Wang
Xin Wu
Assignee (at issue)
Symyx Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.