Granted Patent
Utility
US 6,365,014 · App. 08/929,176
Cathode targets of silicon and transition metal
Inventor:
James J. Finley
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Sep 8, 1997
Inventor
James J. Finley
Assignee (at issue)
PPG Industries Ohio, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.