IP Library › Granted Patent US 6,365,322
Granted Patent Utility
US 6,365,322 · App. 09/455,872

Photoresist composition for deep UV radiation

Inventors: Munirathna Padmanaban, Ralph R. Dammel
Patented Case View Patent ↗
Granted: Apr 2, 2002 Filed: Dec 7, 1999
Inventors
Munirathna Padmanaban
Ralph R. Dammel
Assignee (at issue)
Clariant Finance (BVI) Limited

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Quick Facts
Patent No.
US 6,365,322
App. No.
09/455,872
Filed
1999-12-07
Granted
2002-04-02
Kind
B1