Granted Patent
Utility
US 6,365,328 · App. 09/522,883
Semiconductor structure and manufacturing method
Inventors:
Hua Shen, David E. Kotecki, Satish D. Athavale, Jenny Lian, Laertis Economikos, Fen F. Jamin, Gerhard Kunkel, Nirmal Chaudhary
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Mar 10, 2000
Inventors
Hua Shen
David E. Kotecki
Satish D. Athavale
Jenny Lian
Laertis Economikos
Fen F. Jamin
Gerhard Kunkel
Nirmal Chaudhary
Assignees (at issue)
Infineon Technologies North America Corp.
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.