Granted Patent
Utility
US 6,366,308 · App. 09/505,605
Laser thermal processing apparatus and method
Inventors:
Andrew M. Hawryluk, Weijian Wang, David G. Stites, Yu Chue Fong
Patented Case
View Patent ↗
Granted: Apr 2, 2002
Filed: Feb 16, 2000
Inventors
Andrew M. Hawryluk
Weijian Wang
David G. Stites
Yu Chue Fong
Assignee (at issue)
Ultratech Stepper, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.