Granted Patent
Utility
US 6,368,049 · App. 09/544,463
Semiconductor manufacturing method and semiconductor manufacturing apparatus
Inventors:
Akihiro Osaka, Hiroshi Sekiyama, Kouichi Noto, Masaki Sugawara
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Apr 7, 2000
Inventors
Akihiro Osaka
Hiroshi Sekiyama
Kouichi Noto
Masaki Sugawara
Assignee (at issue)
KOKUSAI ELECTRIC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.