Granted Patent
Utility
US 6,368,404 · App. 09/298,079
Induction heated chemical vapor deposition reactor
Inventors:
Alexander I. Gurary, Paul Thomas Fabiano, David Russell Voorhees, Scott Beherrell
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Apr 23, 1999
Inventors
Alexander I. Gurary
Paul Thomas Fabiano
David Russell Voorhees
Scott Beherrell
Assignee (at issue)
EMCORE CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.