Granted Patent
Utility
US 6,368,516 · App. 09/339,519
Semiconductor manufacturing methods
Inventors:
Enio Carpi, Steffen Schulze
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Jun 24, 1999
Inventors
Enio Carpi
Steffen Schulze
Assignee (at issue)
Infineon Technologies North America Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.