Granted Patent
Utility
US 6,368,665 · App. 09/067,975
Apparatus and process for controlled atmosphere chemical vapor deposition
Inventors:
Andrew Tye Hunt, Subramaniam Shanmugham, William Danielson, Henry Luten, Tzyy Jiuan Hwang, Girish Nilkanth Deshpande
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Apr 29, 1998
Inventors
Andrew Tye Hunt
Subramaniam Shanmugham
William Danielson
Henry Luten
Tzyy Jiuan Hwang
Girish Nilkanth Deshpande
Assignee (at issue)
MicroCoating Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.