Granted Patent
Utility
US 6,368,907 · App. 09/661,369
Method of fabricating semiconductor device
Inventors:
Hiroyuki Doi, Takao Yamaguchi
Patented Case
View Patent ↗
Granted: Apr 9, 2002
Filed: Sep 13, 2000
Inventors
Hiroyuki Doi
Takao Yamaguchi
Assignee (at issue)
SUMITOMO ELECTRIC INDUSTRIES, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.