Granted Patent
Utility
US 6,370,793 · App. 09/584,551
Apparatus for controlling the temperature of a wafer located at a pre-alignment stage
Inventors:
Hee-Sun Chae, Jae Il Kim, Yo-Han Ahn
Patented Case
View Patent ↗
Granted: Apr 16, 2002
Filed: Jun 1, 2000
Inventors
Hee-Sun Chae
Jae Il Kim
Yo-Han Ahn
Assignee (at issue)
SAMSUNG DISPLAY CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.