Granted Patent
Utility
US 6,371,713 · App. 09/143,027
Substrate processing apparatus
Inventors:
Joichi Nishimura, Masami Ohtani, Yasuhiko Hashimoto
Patented Case
View Patent ↗
Granted: Apr 16, 2002
Filed: Aug 28, 1998
Inventors
Joichi Nishimura
Masami Ohtani
Yasuhiko Hashimoto
Assignee (at issue)
DAINIPPON SCREEN MFG. CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.