Granted Patent
Utility
US 6,372,671 · App. 09/652,796
Surface stabilization of silicon rich silica glass using increased post deposition delay
Inventor:
Vincent Fortin
Patented Case
View Patent ↗
Granted: Apr 16, 2002
Filed: Aug 31, 2000
Inventor
Vincent Fortin
Assignee (at issue)
Zarlink Semiconductor (US) Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.