Granted Patent
Utility
US 6,374,396 · App. 09/205,896
Correction of field effects in photolithography
Inventors:
Bill Baggenstoss, Christophe Pierrat
Patented Case
View Patent ↗
Granted: Apr 16, 2002
Filed: Dec 4, 1998
Inventors
Bill Baggenstoss
Christophe Pierrat
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.