Granted Patent
Utility
US 6,375,693 · App. 09/307,123
Chemical-mechanical planarization of barriers or liners for copper metallurgy
Inventors:
William J. Cote, Daniel C. Edelstein, Naftali E. Lustig
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: May 7, 1999
Inventors
William J. Cote
Daniel C. Edelstein
Naftali E. Lustig
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.