IP Library › Granted Patent US 6,376,151
Granted Patent Utility
US 6,376,151 · App. 09/673,019

Positive resist composition

Inventors: Hideaki Takahashi, Masashi Kimura, Takahiro Sasaki
Patented Case View Patent ↗
Granted: Apr 23, 2002 Filed: Oct 10, 2000
Inventors
Hideaki Takahashi
Masashi Kimura
Takahiro Sasaki
Assignee (at issue)
ASAHI KASEI KABUSHIKI KAISHA

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Quick Facts
Patent No.
US 6,376,151
App. No.
09/673,019
Filed
2000-10-10
Granted
2002-04-23
Kind
B1