Granted Patent
Utility
US 6,376,272 · App. 09/588,427
InA1As etch stop layer for precise semiconductor waveguide fabrication
Inventors:
Aaron Bond, Abdallah Ougazzaden, Gleb E. Shtengel
Patented Case
View Patent ↗
Granted: Apr 23, 2002
Filed: Jun 6, 2000
Inventors
Aaron Bond
Abdallah Ougazzaden
Gleb E. Shtengel
Assignee (at issue)
LUCENT TECHNOLOGIES INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.